Broadband, Efficient, and Low Dark Current SiN-on-SOI Waveguide-Coupled Photodetectors for Visible Light (W2A.37)
Presenter: Alperen Govdeli, Max Planck Institute of Microstructure P
We demonstrate foundry-fabricated waveguide-coupled photodetectors wherein silicon nitride waveguides pass overtop doped silicon-on-insulator patches. At a 5V reverse bias, dark currents < 8pA, and red, green, and blue-wavelength external quantum efficiencies >70% were measured.
Authors:Alperen Govdeli, Max Planck Institute of Microstructure P / Jared Mikkelsen, Max Planck Institute of Microstructure P / Abhishek Suriya, Max Planck Institute of Microstructure P / Hongyao Chua, Advanced Micro Foundry Pte. Ltd. / Patrick Lo, Advanced Micro Foundry Pte. Ltd. / Joyce Poon, Max Planck Institute of Microstructure P / Wesley Sacher, Max Planck Institute of Microstructure P