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Monolithically Integrated Silicon Nitride Platform (Th1A.46)

Presenter: Yusheng Bian, GLOBALFOUNDRIES

A comprehensive set of SiN building blocks was demonstrated on a monolithic SiPh platform. Low-loss SiN waveguides (<0.35dB/cm), Si-SiN transitions (0.026dB), efficient polarization splitters/rotators, and compact ring WDM filters were realized at O-band.

Authors:Yusheng Bian, GLOBALFOUNDRIES / Colleen Meagher, GLOBALFOUNDRIES / Karen Nummy, GLOBALFOUNDRIES / Sujith Chandran, Khalifa University / Wonsuk Lee, GLOBALFOUNDRIES / Abdelsalam Aboketaf, GLOBALFOUNDRIES / Danhao Ma, GLOBALFOUNDRIES / Ryan Sporer, GLOBALFOUNDRIES / Michal Rakowski, GLOBALFOUNDRIES / Nuh Yuksek, GLOBALFOUNDRIES / Monica Esopi, GLOBALFOUNDRIES / Bo Peng, GLOBALFOUNDRIES / Yangyang Liu, GLOBALFOUNDRIES / Abu Thomas, GLOBALFOUNDRIES / Tymon Barwicz, IBM / Takako Hirokawa, GLOBALFOUNDRIES / Javier Ayala, GLOBALFOUNDRIES / Asli Sahin, GLOBALFOUNDRIES / Andy Stricker, GLOBALFOUNDRIES / Subramanian Krishnamurthy, GLOBALFOUNDRIES / Shuren Hu, GLOBALFOUNDRIES / Zoey Sowinski, GLOBALFOUNDRIES / Kate Mclean, GLOBALFOUNDRIES / Louis Medina, GLOBALFOUNDRIES / Kevin Dezfulian, GLOBALFOUNDRIES / Michelle Zhang, GLOBALFOUNDRIES / Mona Nafari, GLOBALFOUNDRIES / Zhuoqiang Jia, GLOBALFOUNDRIES / Kaushikee Mishra, GLOBALFOUNDRIES / Asif Chowdhury, GLOBALFOUNDRIES / Jaime Viegas, Khalifa University / Rod Augur, GLOBALFOUNDRIES / Dave Riggs, GLOBALFOUNDRIES / Luke Lee, GLOBALFOUNDRIES / Wenhe Lin, GLOBALFOUNDRIES / Ajey Jacob, GLOBALFOUNDRIES / Vikas Gupta, GLOBALFOUNDRIES / Anthony Yu, GLOBALFOUNDRIES / Ken Giewont, GLOBALFOUNDRIES / Ted Letavic, GLOBALFOUNDRIES / John Pellerin, GLOBALFOUNDRIES


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